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Center for Optics & Optical Communications

 Lithography

 Metrology

  • Alpha Step Surface Profiler
  • X-Ray Interferometer
  • Zygo 4" Interferometer
  • Veeco General Purpose Phase Shifting Interferometer
  • Fisba-Optik Micro Interferometer

Imaging and Characterization

  •  Z-scan Apparatus
  • Nano Alignment Systems 
  • JEOL Scanning Electron Microscope
  • Veeco Scanning Probe Microscope
  • Tektronix Semiconductor Parameter Tester
  • Woolam Spectroscopic Ellipsometer
  • Veeco Nanoscope IV SPM Control Station
  • Spectrometers and Microscopes
  • STN Probe Station
  • Cathodoluminescence
  • EDAX
  • Deep Level Transient Spectroscopy

Laser Facility 

  • Fiber Laser Modules
  • Continuum Pulsed Q-Switched NDYag Laser
  • Research Grade Optical Tables
  • ExcelYag Laser Opotic System
  • Femtosecond Laser System

Simulation and Modeling

  • EM Premier Workstation
  • Rsoft
  • FemLab
  • FDTD

Networking and Fiber Optics

Materials Deposition and Etching

  • Rapid Thermal Process System
  • Omicron STM/AFM System
  • AJA Ion Milling System
  • AJA Sputtering Tool
  • ICP Compound Semiconductor Etch System
  • ICP Dielectric Etch System
  • ICP Deep Silicon Etch System
  • PECVD
  • MOCVD
  • K&S Wire Bonder
  • Scribe and Break Tool
  • Evaporator
  • Flip-chip Bonder
  • Supercritical Drying Station

Clean Room Basic Operations